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Dielectric properties of ‘‘diamondlike’’ carbon prepared by rf plasma deposition

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FIFTH ASILOMAR CONFERENCE ON CIRCUITS AND SYSTEMS.

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InP MIS structures with diamondlike amorphous carbon films deposited by ion-beam sputtering and from plasma☆

D. C. Liu, P. G. Snyder, J. Woollam, 1986 .

‘‘Diamondlike’’ carbon films: Optical absorption, dielectric properties, and hardness dependence on deposition parameters

D. C. Liu, V. Natarajan, J. Woollam, 1985 .