J. Moon

Pattern Displacement Error Under Off-Axis Illumination

Nakgeuon Seong, Hoyoung Kang, Jongwook Kye, 1998, Digest of Papers. Microprocesses and Nanotechnology'98. 198 International Microprocesses and Nanotechnology Conference (Cat. No.98EX135).

Real-time process monitoring by optical emission spectroscopy in DRAM gate CD control

Hanku Cho, J. Moon, Yongjin Kim, 2005, ISSM 2005, IEEE International Symposium on Semiconductor Manufacturing, 2005..