Yi Cao

发表

Dynamic behavior in self-assembly process of cylindrical phase PS-b-PMMA block copolymer

R. Gronheid, M. Ferhat, M. L. Seiad, 2017 .

Directed self-assembly materials for high resolution beyond PS-b-PMMA

Edward Ng, Jianhui Shan, Yi Cao, 2016, SPIE Advanced Lithography.

Charge distribution and crystalline structure in polyethylene nucleated with sorbitol

Demin Tu, Yi Cao, Yi Yin, 2001 .

Degradation behavior of poly(epsilon-caprolactone)-b-poly(ethylene glycol)-b-poly(epsilon-caprolactone) micelles in aqueous solution.

Haixiong Ge, Yong Hu, Xiqun Jiang, 2004, Biomacromolecules.

Rheological Study of the Sol-Gel Transition of Hybrid Gels

Yuliang Yang, Yue Zhao, Chi Wu, 2003 .

Viscoelastic Effects on the Dynamics of Spinodal Decomposition in Binary Polymer Mixtures

Yuliang Yang, Hongdong Zhang, Zhangyang Xiong, 2001 .

pH-induced self-assembly and capsules of sodium alginate.

Xiaochen Shen, Xiqun Jiang, Yi Cao, 2005, Biomacromolecules.

Microstructure evolution and grain refinement of ultrasonic-assisted soldering joint by using Ni foam reinforced Sn composite solder

Yong Xiao, Haitao Gao, Lizhi Song, 2022, Ultrasonics sonochemistry.

The Limits of Lamellae-Forming PS-b-PMMA Block Copolymers for Lithography.

Lei Wan, Jian Yin, Yi Cao, 2015, ACS nano.

Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication

Yi Cao, Roel Gronheid, Joost Bekaert, 2015 .

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Lieve Van Look, Yi Cao, Hari Pathangi, 2014, Advanced Lithography.

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Yi Cao, Hari Pathangi, Roel Gronheid, 2015 .

Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Lieve Van Look, Yi Cao, Hari Pathangi, 2015, Advanced Lithography.

Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment

Mark Neisser, Yi Cao, Roel Gronheid, 2012 .

All track directed self-assembly of block copolymers: process flow and origin of defects

Hengpeng Wu, Yi Cao, Roel Gronheid, 2012, Advanced Lithography.

Advanced CD-SEM metrology for pattern roughness and local placement of lamellar DSA

Hiroshi Yoshida, Takeshi Kato, Yi Cao, 2014, Advanced Lithography.

Synthesis of alginic acid-poly[2-(diethylamino)ethyl methacrylate] monodispersed nanoparticles by a polymer-monomer pair reaction system.

R. Guo, Xiqun Jiang, Zhiping Jiang, 2007, Biomacromolecules.

Impact of BCP asymmetry on DSA patterning performance

Yi Cao, Roel Gronheid, Guanyang Lin, 2015, Advanced Lithography.

Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration

Yi Cao, Roel Gronheid, Kathleen Nafus, 2013, Advanced Lithography.

Negative-tone resists for EUV lithography

Philipp H. Fackler, Youngjin Kim, Masatoshi Suzuki, 2023, Advanced Lithography.