M. Miyoshi

发表

Edge Roughness Study of Chemically Amplified Resist in Low-Energy Electron-Beam Lithography Using Computer Simulation

H. Fujioka, T. Nakasugi, A. Ando, 2002 .

Alignment system using voltage contrast images for low-energy electron-beam lithography

Katsuya Okumura, Tetsuro Nakasugi, Atsushi Ando, 2001 .

Maskless lithography using low-energy electron beam: Recent results for proof-of-concept system

I. Mori, H. Fujioka, T. Nakasugi, 2002 .

Electron optics using multipole lenses for a low energy electron beam direct writing system

A. Ando, Y. Yamazaki, K. Sugihara, 2002 .

Development of the field emission electron gun integrated in the sputter ion pump

Yuichiro Yamazaki, Motosuke Miyoshi, Y. Yamazaki, 1991 .

Measurement of Particles on Wafer Surfaces

M. Miyoshi, 1998 .

BEAM INDUCED DEPOSITION OF AN ULTRAVIOLET TRANSPARENT SILICON OXIDE FILM BY FOCUSED GALLIUM ION BEAM

I. Mori, Hiroko Nakamura, S. Inoue, 1996 .

Effect of the Electron-Irradiation-Induced-Contamination of the Etching Process of a Photoresist

M. Miyoshi, K. Okumura, K. Norimatsu, 1987 .

X-ray tube with a graphite field emitter inflamed at high temperature.

H. Mimura, T. Koike, M. Miyoshi, 2013, Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics.

Development of the compact low-energy soft x-ray CT instrument for the soft material structural analysis

T. Kodama, T. Hamakubo, N. Aoki, 2008 .

Anamorphotic quadrupole lens system for highly demagnified round spot

Y. Yamazaki, M. Miyoshi, 1995 .

Measurement of geometrical dimensions using scanning electron microscopy

M. Miyoshi, F. Komatsu, Koji Tsubusaki, 1999 .

Laboratory-size three-dimensional water-window x-ray microscope with Wolter type I mirror optics

Shinji Ohsuka, Motosuke Miyoshi, Shinobu Onoda, 2016 .