S. Jeong

Actinic critical dimension measurement of contaminated extreme ultraviolet mask using coherent scattering microscopy

Jinho Ahn, Seongchul Hong, J. U. Lee, 2014 .

Imaging performance of attenuated phase-shift mask using coherent scattering microscope

Jae Uk Lee, Seung Min Lee, Jinho Ahn, 2014, Advanced Lithography.