M. Urakawa

Evaluation of lattice strain in silicon substrate beneath aluminum conductor film using high-resolution X-ray microbeam diffractometry

Y. Kagoshima, Y. Tsusaka, J. Matsui, 2002 .

Scanning hard X-ray microscope with tantalum phase zone plate at the Hyogo-BL (BL24XU) of SPring-8

Y. Kagoshima, Y. Tsusaka, J. Matsui, 2001 .

High-resolution microbeam x-ray diffractometry applied to InGaAsP/InP layers grown by narrow-stripe selective metal-organic vapor phase epitaxy

H. Kimura, S. Kimura, Y. Kagoshima, 2000 .

Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam

Y. Kagoshima, Y. Tsusaka, J. Matsui, 2003 .