M. Katou

Evaluation of lattice strain in silicon substrate beneath aluminum conductor film using high-resolution X-ray microbeam diffractometry

Y. Kagoshima, Y. Tsusaka, J. Matsui, 2002 .

Estimation of bonded silicon-on-insulator wafers by means of diffractometry using a parallel X-ray microbeam

Y. Kagoshima, Y. Tsusaka, J. Matsui, 2003 .