Hyun-Tae Kim

Adhesion and removal behavior of particulate contaminants from EUV mask materials

Min-Su Kim, Jin-Goo Park, M. Purushothaman, 2017 .

Removal of EUV exposed hydrocarbon from Ru capping layer of EUV mask using the mixture of alkaline solutions and organic solvents

Young Woong Kim, Jinho Ahn, Min-Su Kim, 2018, Colloids and Surfaces A: Physicochemical and Engineering Aspects.

Adsorption of sodium dodecyl sulfate on cleaning of an N-polar GaN surface in an alkaline solution

Min-Su Kim, Jin-Goo Park, Hyun-Tae Kim, 2017 .

Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant

B. Sahoo, K. Ando, Jin-Goo Park, 2021, Ultrasonics sonochemistry.

Characterization of the influence of Ni content on the corrosion resistance of electrodeposited Zn–Ni alloy coatings

J. M. Park, S. Cho, Hyun-Tae Kim, 2016 .

Effect of organic acids in dilute HF solutions on removal of metal contaminants on silicon wafer

Jin-Goo Park, Eun-Suck Choi, Hyun-Tae Kim, 2018, Microelectronic Engineering.

Post-CMP Cleaning of InGaAs Surface for the Removal of Nanoparticle Contaminants for Sub-10nm Device Applications

Jung-Hwan Lee, L. Teugels, Jin-Goo Park, 2019, ECS Journal of Solid State Science and Technology.

Investigation of oxide layer removal mechanism using reactive gases

D. Ko, Jin-Goo Park, H. Oh, 2015 .

Study on Aluminum Frame Surface Cleaning Process for Photomask Pellicle Fabrication

김현태, 박진구, 이준, 2015 .