Chia-Lung Lee

Local wet etching of glasses by acidification utilizing electrochemistry

M. Matsumura, K. Tsujino, S. Imai, 2008 .

Pore formation in silicon by wet etching using micrometre-sized metal particles as catalysts

S. Ikeda, M. Matsumura, K. Tsujino, 2008 .

Electrochemical method for slicing Si blocks into wafers using platinum wire electrodes

Michio Matsumura, Chia-Lung Lee, Shigeru Ikeda, 2011 .

Development of New Methods for Fine-Wiring in Si Using a Wet Catalytic Reaction

S. Ikeda, M. Matsumura, Chia-Lung Lee, 2011 .

Formation of 100 μm Deep Vertical Pores in Si Wafers by Wet Etching and Cu Electrodeposition

S. Ikeda, M. Matsumura, Chia-Lung Lee, 2009 .

Electrochemical Grooving of Si Wafers Using Catalytic Wire Electrodes in HF Solution

Michio Matsumura, Takeshi Hirai, Chia-Lung Lee, 2009 .

Acceleration of groove formation in silicon using catalytic wire electrodes for development of a slicing technique

Michio Matsumura, Chia-Lung Lee, Shigeru Ikeda, 2010 .

Formation of through-holes in Si wafers by using anodically polarized needle electrodes in HF solution.

S. Ikeda, M. Matsumura, Chia-Lung Lee, 2011, ACS applied materials & interfaces.