R. Sharangpani

In Situ Rapid Thermal Oxidation and Reduction of Copper Thin Films and Their Applications in Ultralarge Scale Integration

S. Tay, Y. Hu, R. Sharangpani, 2001 .

Kinetic investigation of copper film oxidation by spectroscopic ellipsometry and reflectometry

S. Tay, Y. Hu, R. Sharangpani, 2000 .

Chemical Vapor Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits

R. Singh, R. Sharangpani, 1997 .

Role of rapid photothermal processing in environmentally conscious semiconductor manufacturing

Rajendra Singh, R. Sharangpani, 1998 .

Area selective deposition of ruthenium on 3D structures

Senaka K. Kanakamedala, M. Gribelyuk, K. Sondhi, 2022, Journal of Vacuum Science & Technology A.

Novel Applications of Rapid Photothermal Chemical Vapor Deposition

K. F. Poole, P. Vasudev, Rajendra Singh, 1998 .

Growth and Characterization of Rapid Thermal Chlorinated Oxides Grown Using In Situ Generated HCl

S. Tay, R. Sharangpani, 2001 .