Mariko Ozawa

Advances in directed self assembly integration and manufacturability at 300 mm

Seiji Nagahara, Kathleen Nafus, Benjamen Rathsack, 2013, Advanced Lithography.

High-volume manufacturing equipment and processing for directed self-assembly applications

Seiji Nagahara, Kathleen Nafus, Benjamen Rathsack, 2014, Advanced Lithography.