Ainhoa Romo Negreira

Advances in directed self assembly integration and manufacturability at 300 mm

Seiji Nagahara, Kathleen Nafus, Benjamen Rathsack, 2013, Advanced Lithography.

High-volume manufacturing equipment and processing for directed self-assembly applications

Seiji Nagahara, Kathleen Nafus, Benjamen Rathsack, 2014, Advanced Lithography.

Driving DSA into volume manufacturing

Seiji Nagahara, Kathleen Nafus, Shinichiro Kawakami, 2015, Advanced Lithography.

Rectification of EUV-patterned contact holes using directed self-assembly

Roel Gronheid, Arjun Singh, Kathleen Nafus, 2013, Advanced Lithography.