H. Mutoh

Nitridation of Al2O3 and GaAs surfaces by control enhanced ECR plasma

P. O’Keeffe, K. Hara, H. Munekata, 1997 .

Energy-selective electron cyclotron resonance plasma for controlled surface reaction processes

P. O’Keeffe, S. Komuro, T. Morikawa, 1996 .

Compact Electron Cyclotron Resonance Plasma Source Optimization for Ion Beam Applications

H. Mutoh, Patrick O'Keeffe Yamakawa, Shoji Den Shoji Den, 1997 .

Oxygen atomic flux O* enhancement by gas-pulsed electron cyclotron resonance plasma

Young Ju Park, Y. Aoyagi, P. O’Keeffe, 1997 .

Study of defects generated from a nitridation of GaAs surface

Young Ju Park, I. Han, P. O’Keeffe, 1997 .