D. Koseki

Characteristics of High Current Pulsed Glow Discharge

K. Takaki, T. Fujiwara, Daisuke Kitamura, 2000 .

Heat flux distribution on a substrate in capacitively coupled radio-frequency discharges

K. Takaki, T. Fujiwara, D. Koseki, 2002 .

Determination of heat and ion fluxes in plasma immersion ion implantation by in situ measurement of temperature using laser interferometry

K. Takaki, T. Fujiwara, D. Koseki, 2001 .