Jian Zhang

A Combined Triboelectrochemical QCM for Studies of the CMP of Copper

Wenquan Lu, F. Kaufman, A. Hillier, 2005 .

Anion Effects on Cu–benzotriazole Film Formation Implications for CMP

P. W. Carter, A. Gewirth, Shoutian Li, 2007 .

A Model of Copper CMP

Jian Zhang, F. Kaufman, E. Paul, 2005 .

Study of Inhibition effects on Copper CMP Slurry Performance

Jian Zhang, Zhiyong Ma, Paul-Chang Lin, 2011 .

Chemical Mechanical Polishing of Tantalum Aqueous Interfacial Reactivity of Tantalum and Tantalum Oxide

P. W. Carter, Shoutian Li, Jian Zhang, 2007 .

Characterization and Use of Quinones as Selective Oxidizers of Tantalum in CMP Applications

P. W. Carter, Shoutian Li, Jian Zhang, 2008 .