A. Bariya

The etching of CHF3 plasma polymer in fluorine‐containing discharges

J. McVittie, C. Frank, S. Self, 1991 .

Specific contact resistivity measurements of reactive ion etched contacts

T. A. Schreyer, K. Saraswat, J. McVittie, 1988 .

A Surface Kinetic Model for Plasma Polymerization with Application to Plasma Etching

J. McVittie, C. Frank, A. Bariya, 1990 .

SPEEDIE: a profile simulator for etching and deposition

James P. McVittie, Juan C. Rey, A. J. Bariya, 1991, Other Conferences.

A New Method for Analyzing Thin Side Wall Inhibitor Layers

T. Lin, A. Bariya, J. Mcvittie, 1986 .