A. Ferchichi

Influence of the ion bombardment of O2 plasmas on low-k materials

P. Verdonck, N. Braithwaite, M. Baklanov, 2011 .

Improved low-k dielectric properties using He/H2 plasma forresist removal

Y. Travaly, K. Vanstreels, D. Shamiryan, 2008 .

Total electronic energy by tight binding approximation and experimental toughness of three different hybrid polymers

P. Etienne, S. Calas, N. Olivi-Tran, 2008 .

Study of the mechanical properties of hybrid coating as a function of their structures using nanoindentation

S. Calas-Etienne, P. Etienne, M. Smaïhi, 2008 .

The influence of N containing plasmas on low-k films

C. Trompoukis, P. Verdonck, M. Baklanov, 2011 .

Effect of bake/cure temperature of an advanced organic ultra low-k material on the interface adhesion strength to metal barriers

Marianna Pantouvaki, Kris Vanstreels, Patrick Verdonck, 2011 .

Relation between structure and mechanical properties (elastoplastic and fracture behavior) of hybrid organic–inorganic coating

S. Calas-Etienne, P. Etienne, G. Prévôt, 2009 .