M. Lux

发表

G. Beyer, Z. Tokei, P. Mertens, 2009, 2009 IEEE International Interconnect Technology Conference.

M. Heyns, T. Bearda, R. Vos, 1998, International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).

S. Sioncke, M. Meuris, W. Fyen, 2007 .

J. Haase, S. Chong, T. Meissner, 2013, Journal of physics. Condensed matter : an Institute of Physics journal.

M. Heyns, R. Vos, M. Meuris, 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).

Marc Meuris, Rob W. Ramage, Rita Vos, 1998, Advanced Lithography.

R. Vos, S. De Gendt, M. Heyns, 1998, 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216).

K. Dransfeld, S. Akari, M. Stachel, 1870 .

M. Heyns, R. Vos, M. Meuris, 1998 .