Kenji Marumoto
发表
Nobuyuki Minami,
Kenji Marumoto,
Hideki Yabe,
1996,
Photomask and Next Generation Lithography Mask Technology.
Hiroshi Watanabe,
Yasutaka Nishioka,
Nobutoshi Mizusawa,
1996,
Advanced Lithography.
Hiroshi Watanabe,
Yukiko Kikuchi,
Yasuji Matsui,
1999,
Photomask and Next Generation Lithography Mask Technology.
Yoichi Yamaguchi,
Hiroyuki Nagasawa,
Yasuji Matsui,
1994,
Advanced Lithography.
Yasuji Matsui,
Kenji Marumoto,
Hideki Yabe,
1994,
Advanced Lithography.
Hiroshi Watanabe,
Hiroaki Sumitani,
Yasuji Matsui,
1995,
Advanced Lithography.
Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film.
Hiroaki Sumitani,
Yasuji Matsui,
Teruhiko Kumada,
1995
.
Yasuji Matsui,
Kenji Marumoto,
Hideki Yabe,
1993
.
Masahiro Nunoshita,
Shunichi Uzawa,
Masafumi Kimata,
1995,
Proceedings of International Electron Devices Meeting.
Mitsuaki Amemiya,
Hiroaki Sumitani,
Kenji Marumoto,
2001
.
Yasuji Matsui,
Kenji Marumoto,
Sunao Aya,
1992
.
Kenji Marumoto,
Hideki Yabe,
Sunao Aya,
1996
.