K. El-Awady

Characterizing photolithographic linewidth sensitivity to process temperature variations for advanced resists using a thermal array

T. Kailath, W. K. Ho, K. El-Awady, 2005 .

Control of spatial and transient temperature trajectories for photoresist processing

Charles D. Schaper, Thomas Kailath, K. El-Awady, 1999 .

Improvements in C/sub pk/ using real-time feedback control

Thomas Kailath, Charles D. Schaper, K. El-Awady, 1996 .

Three-dimensional surface displacement tracking for in-situ experiments: An alternative to digital image correlation (DIC)

J. El-Awady, K. El-Awady, Steven Lavenstein, 2023, Scripta Materialia.

Applicability of Large Corporate Credit Models to Small Business Risk Assessment

Khalid El-Awady, K. El-Awady, 2021, ArXiv.

Control systems for the nanolithography process

T. Kailath, A. Tay, K. El-Awady, 1999, Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No.99CH36304).

Applications of control and signal processing to the microlithographic process

T. Kailath, C. Schaper, A. Tay, 1999, IECON'99. Conference Proceedings. 25th Annual Conference of the IEEE Industrial Electronics Society (Cat. No.99CH37029).