Wolfgang Doleschal

Micromirrors for direct writing systems and scanners

Harald Schenk, Peter Duerr, Alexander Wolter, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Fabrication of the moving liquid mirror (MLM) spatial light modulator in a standard CMOS process

Alexander Wolter, Kai Frohberg, Kay-Uwe Kirstein, 2000, SPIE MOEMS-MEMS.

Test system for micro mirror arrays

Hubert Lakner, Alexander Wolter, Peter Dürr, 2000 .

New system for fast submicron laser direct writing

Rolf Seltmann, Detlef Kunze, Joerg Paufler, 1995, Advanced Lithography.

Design and fabrication of micromirror arrays for UV lithography

Peter Duerr, Ulrike Dauderstaedt, Hubert K. Lakner, 2001, SPIE MOEMS-MEMS.

Test system for micromirror arrays

Peter Duerr, Alexander Wolter, Hubert K. Lakner, 2000, SPIE MOEMS-MEMS.

High-throughput optical direct write lithography

Wolfgang Doleschal, Andreas Gehner, R. Seltmann, 1997 .

Improved vision by eye aberration correction using an active-matrix-addressed micromirror array

Harald Schenk, Hubert Lakner, Wolfgang Doleschal, 2003, SPIE MOEMS-MEMS.

Active-matrix-addressed micromirror array for wavefront correction in adaptive optics

Detlef Kunze, Wolfgang Doleschal, Andreas Gehner, 2001, SPIE MOEMS-MEMS.

Deformable micromirror devices as phase-modulating high-resolution light valves

Wolfgang Doleschal, Andreas Gehner, R. Seltmann, 1996 .