A.E. Flower

The mechanical influence of the porosity and nano-scale pore size effect of the SiOC(H) dielectric film

M. Cherkaoui, O. van der Sluis, W. V. van Driel, 2008, EuroSimE 2008 - International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems.

Molecular simulation strategy for mechanical modeling of amorphous/porous low-dielectric constant materials

W. Driel, Guoqi Zhang, C. Yuan, 2008 .