Robert L. Maier

Wavefront control of UV narrow bandpass filters prepared by plasma ion-assisted deposition

Horst Schreiber, Jue Wang, Robert L. Maier, 2006, SPIE Optics + Photonics.

The capability of a 1.3-NA μstepper using 3D EMF mask simulations

Douglas S. Goodman, Jeff Meute, Will Conley, 2006, SPIE Advanced Lithography.

Correlation between mechanical stress and optical property of SiO2/Ta2O5 multilayer UV narrow band filter deposited by plasma ion-assisted deposition

Jue Wang, Robert L. Maier, Jue Wang, 2005, SPIE Optics + Photonics.

Surface characterization of optically polished CaF2 crystal by quasi-Brewster angle technique

Robert L. Maier, John H. Bruning, Jue Wang, 2003, SPIE Optics + Photonics.

Hyper-numerical aperture imaging challenges for 193 nm

Will Conley, Douglas S. Goodman, Robert L. Maier, 2004, SPIE Advanced Lithography.

Color center formation on CaF 2 (111) surface investigated by low-energy-plasma-ion surfacing

Robert L. Maier, Jue Wang, 2004 .

Quasi-Brewster angle technique for evaluating the quality of optical surfaces

Robert L. Maier, Jue Wang, 2004, SPIE Advanced Lithography.