K. Ozaki

Quantifying modal shapes in smart piezoelectric ultrasonic transducer array: Modeling and experiment

D. Akai, M. Ishida, K. Sawada, 2013, 2013 IEEE SENSORS.

Vibration Analysis and Transmission Characteristics of Piezoelectric Micromachined Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O3 Thin Films on γ-Al2O3/Si Substrate

D. Akai, M. Ishida, N. Okada, 2012 .

Fabrication and characterization of a smart epitaxial piezoelectric micromachined ultrasonic transducer

D. Akai, M. Ishida, K. Sawada, 2014 .

Correlation between residual stresses and bending in functional electroceramic-based MEMS actuator

D. Akai, M. Ishida, K. Sawada, 2014 .

Dynamic behavior of a new surface-micromachined piezoelectric material actuated micro-mirror device

D. Akai, M. Ishida, K. Sawada, 2011 .

Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film

D. Akai, M. Ishida, K. Sawada, 2010, International Conference on Optical MEMS and Nanophotonics.

Failsafe wafer-level packaging of a piezoelectric MEMS actuator

D. Akai, M. Ishida, K. Sawada, 2012, 2012 IEEE 62nd Electronic Components and Technology Conference.

Miniature ultrasound acoustic imaging devices using 2-D pMUTs array on epitaxial PZT/SrRuO3/Pt/³-Al2O3/Si structure

Makoto Ishida, Kazuaki Sawada, Daisuke Akai, 2011, International Solid-State Sensors, Actuators and Microsystems Conference.

Dynamic analysis of structure of a piezoelectric MEMS micro-mirror actuator: Effects of chip anisotropy and residual stress

D. Akai, M. Ishida, K. Sawada, 2009, 2009 11th Electronics Packaging Technology Conference.