Moriya Miyashita

Improvement of thin oxide quality by hydrogen annealed wafer

Yoshiaki Matsushita, Hiroyasu Kubota, Y. Matsushita, 1994, Proceedings of 1994 IEEE International Electron Devices Meeting.

Noncontact evaluation for interface states by photocarrier counting

H. Kubota, K. Izunome, Moriya Miyashita, 2018 .

Effect of Oxygen Precipitation in Nitrogen-Doped Annealed Silicon Wafers on Thermal Strain Induced by Rapid Thermal Processing

H. Tsubota, Hiromichi Isogai, K. Izunome, 2010 .

Impacts of Surface Roughness Reduction in (110) Si Substrates Fabricated by High-Temperature Annealing on Electron Mobility in n-Channel Metal–Oxide–Semiconductor Field-Effect Transistors on (110) Si

N. Taoka, M. Takenaka, S. Takagi, 2013 .

Nondestructive interface state measurement by pulse photoconductivity method

H. Kubota, K. Izunome, Moriya Miyashita, 2016 .