Ying Chen

EUV multilayer defect characterization via cycle-consistent learning.

Yajuan Su, Yayi Wei, Lisong Dong, 2020, Optics express.

Semisupervised Hotspot Detection With Self-Paced Multitask Learning

Yayi Wei, David Z. Pan, Yibo Lin, 2020, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems.

Hotspot detection in large-scale layout with proposal sampling and feature parameters optimization

Xiaojing Su, Tianyang Gai, Yayi Wei, 2021, Journal of Micro/Nanopatterning, Materials, and Metrology.

ETCH Model Based on Machine Learning

Xiaojing Su, Yayi Wei, Lisong Dong, 2020, 2020 China Semiconductor Technology International Conference (CSTIC).

SoulNet: ultrafast optical source optimization utilizing generative neural networks for advanced lithography

Yayi Wei, David Z. Pan, Lisong Dong, 2019, Journal of Micro/Nanolithography, MEMS, and MOEMS.