M. Murata

Thin-film thermoelectric generator based on polycrystalline SiGe formed by Ag-induced layer exchange

T. Suemasu, M. Tsuji, M. Murata, 2020 .

Atomic layer deposition of amorphous TiO2/ZnO multilayers for soft x-ray coherent optics

Masaki Murata, Yuji Tanaka, Hiroshi Kumagai, 2011, LASE.

Atomic layer epitaxy of TiO2/ZnO multilayer optics using ZnO buffer layer for water-window x-ray

Masaki Murata, Yuji Tanaka, Hiroshi Kumagai, 2011, MOEMS-MEMS.

Novel TiO2/ZnO multilayer mirrors at ‘water-window’ wavelengths fabricated by atomic layer epitaxy

H. Kumagai, Y. Masuda, H Kumagai, 2010, Journal of physics. Condensed matter : an Institute of Physics journal.

Fabrication of Al2O3/TiO2 multilayer mirrors for water-window attosecond pulses

Masaki Murata, Yuji Tanaka, Hiroshi Kumagai, 2010, LASE.