K. Rex Chen
发表
Wu-Song Huang,
Steven J. Holmes,
Toshiharu Furukawa,
1999,
Advanced Lithography.
George M. Jordhamo,
Wayne M. Moreau,
K. Rex Chen,
1996,
Advanced Lithography.
Alan C. Thomas,
George M. Jordhamo,
Zhijian G. Lu,
2000,
Advanced Lithography.
William R. Brunsvold,
Hiroshi Ito,
Thomas I. Wallow,
2000,
Advanced Lithography.
Eiichi Kobayashi,
Pushkara Rao Varanasi,
Margaret C. Lawson,
2003,
SPIE Advanced Lithography.
George M. Jordhamo,
Robert D. Allen,
Ranee W. Kwong,
1997,
Advanced Lithography.
Wu-Song Huang,
K. Rex Chen,
Dominic J. Schepis,
1996,
Advanced Lithography.
Doris Kang,
Ronald A. DellaGuardia,
Wu-Song Huang,
1999,
Advanced Lithography.
Marie Angelopoulos,
Wayne M. Moreau,
K. Rex Chen,
1997,
Advanced Lithography.
Margaret C. Lawson,
Ranee W. Kwong,
K. Rex Chen,
1998,
Advanced Lithography.
William R. Brunsvold,
George M. Jordhamo,
Pushkara Rao Varanasi,
2001,
SPIE Advanced Lithography.
Robert D. Allen,
Paula M. Gallagher-Wetmore,
K. Rex Chen,
1995,
Advanced Lithography.
Charles N. Archie,
Wu-Song Huang,
K. Rex Chen,
2001,
SPIE Advanced Lithography.
Selection of attenuated phase shift mask compatible contact hole resists for KrF optical lithography
Daniel Liu,
Alan C. Thomas,
George M. Jordhamo,
1999,
Advanced Lithography.