S. Felch
发表
B. Koo,
Z. Fang,
S. Felch,
2000,
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).
B. Koo,
Z. Fang,
S. Felch,
2002
.
W. Vandervorst,
S. Severi,
T. Janssens,
2006,
2005 13th International Conference on Advanced Thermal Processing of Semiconductors.
B. Cabrera,
M. Taber,
J. Tate,
1989
.
P. Chu,
L. Larson,
S. Felch,
1999
.
D. Chapek,
R. Matyi,
D. Brunco,
1997
.
D. Lenoble,
M. Lin,
G. Yeap,
1999
.
Ho-Kyu Kang,
K. Fujihara,
S. Felch,
2001
.
S. Salimian,
D. Hodul,
S. Felch,
1992
.
S. Satoh,
S. Felch,
R. Liebert,
1991
.
P. Absil,
S. Biesemans,
T. Hoffman,
2008,
2008 International Symposium on VLSI Technology, Systems and Applications (VLSI-TSA).
T. Hoffmann,
S. Thirupapuliyur,
R. Schreutelkamp,
2008
.
N. Cowern,
H. Graoui,
M. Foad,
2004
.
D. Chapek,
R. Matyi,
J. Conrad,
1993
.
S. Felch,
M. C. Taylor,
2013
.
A. Hikavyy,
E. Rosseel,
O. Richard,
2007,
2007 15th International Conference on Advanced Thermal Processing of Semiconductors.
E. Seebauer,
R. Vaidyanathan,
M. Foad,
2011
.
P. Thompson,
J. Bennett,
R. Crosby,
2004
.
Phillip E. Thompson,
Joe Bennett,
P. Thompson,
2004
.
R. Matyi,
Y. Guo,
J. A. Keenan,
1998
.
M. Lieberman,
N. Cheung,
M. Current,
1991
.
D. Chapek,
R. Matyi,
J. Conrad,
1994
.
F. Torregrosa,
H. Etienne,
L. Roux,
2011
.
W. A. Keenan,
Andrew P. Stack,
S. Felch,
1993
.
M. Current,
L. Larson,
S. Felch,
1989
.
A. Ahmad,
S. Felch,
B.S. Lee,
1996,
Proceedings of 11th International Conference on Ion Implantation Technology.
M. Goeckner,
S. Felch,
S. Mehta,
1999
.
Z. Fang,
S. Felch,
R. Liebert,
2000,
2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).
Wen-Chin Lee,
S. Demuynck,
Jianxin Lei,
2008,
IEEE Transactions on Electron Devices.
A. Falepin,
S. Felch,
V. Parihar,
2005
.
C. B. Cooper,
S. Felch,
T. Sheng,
1994
.
W. Vandervorst,
N. Cowern,
R. Duffy,
2006
.
F. Torregrosa,
H. Etienne,
L. Roux,
2011
.
S. Felch,
L. Larson,
2022,
MRS Advances.
G. Tsai,
H. Graoui,
A. Mayur,
2005
.
M. Goeckner,
Z. Fang,
S. Felch,
1999,
1999 4th International Symposium on Plasma Process-Induced Damage (IEEE Cat. No.99TH8395).
R. Matyi,
D. Brunco,
E. Ishida,
1996,
Proceedings of 11th International Conference on Ion Implantation Technology.
L. Overzet,
M. Goeckner,
S. Felch,
2002,
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on.
C. B. Cooper,
S. Felch,
T. Sheng,
1993
.
B. Cabrera,
J. Tate,
S. Felch,
1985,
Physical review. B, Condensed matter.