Shinsuke Mizuno

Dielectric Constant and Stability of Fluorine‐Doped Plasma Enhanced Chemical Vapor Deposited SiO2 Thin Films

A. Verma, B. Nguyen, P. W. Lee, 1996 .

Characterization of Light propagation loss in Photonics devices using High-Resolution CDSEM metrology

C. Dupré, C. Vannuffel, Shinsuke Mizuno, 2022, International Symposium on Semiconductor Manufacturing.

Dielectric constant and stability of fluorine doped PECVD silicon oxide thin films

A. Verma, B. Nguyen, P. W. Lee, 1996 .

Improved gap-filling capability of fluorine-doped PECVD silicon oxide thin films

A. Verma, B. Nguyen, P. W. Lee, 1996 .