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Film Properties of Low-Density and Ultra-Low-Dielectric-Constant Material

A. Nakashima, Ryo Muraguchi, M. Komatsu, 1999 .

Pore interconnectivity of nanoclustering silica porous films as studied by positronium time-of-flight spectroscopy

Kiminori Sato, A. Nakashima, R. Yu, 2005 .

Characterization of Porous Silicate Low- k Films by Ellipsometric Porosimetry and Variable-energy Positron Annihilation Spectroscopy

Kiminori Sato, T. Ohdaira, R. Suzuki, 2003 .