Yannan Shen

Fabrication and characterization of multi-stopband Fabry–Pérot filter array for nanospectrometers in the VIS range using SCIL nanoimprint technology

H. Hillmer, C. Woidt, André Istock, 2018, Applied Nanoscience.

Highly uniform residual layers for arrays of 3D nanoimprinted cavities in Fabry–Pérot-filter-array-based nanospectrometers

H. Hillmer, C. Woidt, Yannan Shen, 2016, Applied Nanoscience.

Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities

Duc Toan Nguyen, H. Hillmer, C. Woidt, 2015 .

Compositional, structural and electronic characteristics of HfO2 and HfSiO dielectrics prepared by radio frequency magnetron sputtering

Zheng-tang Liu, Yannan Shen, Li-ping Feng, 2009 .