Heli Seppänen

Atomic Layer Deposition of PbS Thin Films at Low Temperatures

M. Ritala, M. Leskelä, H. Koivula, 2020 .

Aluminum Nitride Transition Layer for Power Electronics Applications Grown by Plasma-Enhanced Atomic Layer Deposition

J. Etula, E. Ubyivovk, H. Lipsanen, 2019, Materials.

Silicon surface passivation with atomic layer deposited aluminum nitride

H. Savin, Yameng Bao, Perttu Sippola, 2017, 2017 IEEE 44th Photovoltaic Specialist Conference (PVSC).

Atomic layer deposition of AlN using atomic layer annealing—Towards high-quality AlN on vertical sidewalls

M. Paulasto-Kröckel, V. Miikkulainen, E. Österlund, 2021, Journal of Vacuum Science & Technology A.

GaAs surface passivation for InAs/GaAs quantum dot based nanophotonic devices

S. Ranta, V. Polojärvi, A. Tukiainen, 2020, Nanotechnology.

Effects of atomic layer deposition on the optical properties of two-dimensional transition metal dichalcogenide monolayers

Zhipei Sun, Mikko Turunen, Heli Seppänen, 2023, 2D Materials.