Zhiyong Ma

3D-AFM Measurements for Semiconductor Structures and Devices

D. Seiler, Zhiyong Ma, 2017 .

Electron Energy Loss Spectroscopy of Semiconductor Nanostructures and Oxides

D. Seiler, Zhiyong Ma, 2017 .

Application of in situ Resistance and Nanocalorimetry Measurements for Nanoelectronic Thin-Film Materials

D. Seiler, Zhiyong Ma, 2017 .

TSV CMP Process Development and Pitting Defect Reduction

Yuchun Wang, Jinhai Xu, Zhiyong Ma, 2012 .

Study of Inhibition effects on Copper CMP Slurry Performance

Jian Zhang, Zhiyong Ma, Paul-Chang Lin, 2011 .

Defect Characterization and Metrology

D. Seiler, Zhiyong Ma, 2017 .