Bachir Dirahoui

Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication

Yunlin Zhang, Narender Rana, Donald Wall, 2015, 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).

Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology

Zachary Baum, Oliver D. Patterson, Shuen-Cheng Chris Lei, 2015 .

Chasing ghosts: How an SRAM detected the subtle impact of stray light

Timothy A. Brunner, Karl Barth, David Clark, 2017, ASMC 2017.

Meeting critical gate linewidth control needs at the 65 nm node

Scott Halle, Allen H. Gabor, Donald J. Samuels, 2006, SPIE Advanced Lithography.

Machine learning and predictive data analytics enabling metrology and process control in IC fabrication

Todd C. Bailey, Yunlin Zhang, Narender Rana, 2015, Advanced Lithography.

Chasing ghosts: How an SRAM detected the subtle impact of stray light

Karl Barth, David Clark, Timothy Brunner, 2017, 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO).