Shigetaka Mori

In-line monitoring test structure for Charge-Based Capacitance Measurement (CBCM) with a start-stop self-pulsing circuit

Abdelkarim Mercha, Ken Sawada, Geert Van der Plas, 2015, Proceedings of the 2015 International Conference on Microelectronic Test Structures.

Study of Lower Voltage Protection against Plasma Process Induced Damage by Quantitative Prediction Technique

Koichi Matsumoto, Shigetaka Mori, Yohei Hiura, 2020, 2020 IEEE International Reliability Physics Symposium (IRPS).

A novel structure of MOSFET array to measure ioff-ion with high accuracy and high density

Diederik Verkest, Eric Beyne, Hidetoshi Ohnuma, 2015, Proceedings of the 2015 International Conference on Microelectronic Test Structures.

Monitoring test structure for plasma process induced charging damage using charge-based capacitance measurement (PID-CBCM)

Hidetoshi Ohnuma, Tsuyoshi Suzuki, Shigetaka Mori, 2015, Proceedings of the 2015 International Conference on Microelectronic Test Structures.

Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip

Hidetoshi Ohnuma, Tsuyoshi Suzuki, Ken Sawada, 2016, 2016 International Conference on Microelectronic Test Structures (ICMTS).

Monitoring Test Structure for Plasma Process-Induced Charging Damage Using Charge-Based Capacitance Measurements

Hidetoshi Ohnuma, Shigetaka Mori, Yuzo Fukuzaki, 2016, IEEE Transactions on Semiconductor Manufacturing.