Hirofumi Funabashi

发表

Testing, Repairing and Packaging Technology for the CMOS-MEMS Integrated Tactile Sensor

Yutaka Nonomura, Masanori Muroyama, Shuji Tanaka, 2013 .

Chip-Level Warp Control of SOI 3-Axis Accelerometer with the Zigzag-Shaped Z-Electrode

Yutaka Nonomura, Masayoshi Esashi, Takahiro Nakayama, 2012 .

Development of a 35Mbps Asynchronous Bus Based Communication System for Tactile Sensors

Yutaka Nonomura, Masayoshi Esashi, Shuji Tanaka, 2014 .

One-chip integrated pressure sensor

Susumu Sugiyama, Shiro Yamashita, Isemi Igarashi, 1990 .

Circuit providing a reference voltage

Yasuaki Makino, Hirofumi Funabashi, Norikazu Ohta, 2006 .

Silicon anisotropic etching without attacking aluminum with Si and oxidizing agent dissolved in TMAH solution

Norio Fujitsuka, Hirofumi Funabashi, Kanae Hamaguchi, 2004 .

ANISOTROPIC ETCHING OF SILICON IN (CH3)4NOH SOLUTIONS

Susumu Sugiyama, Osamu Tabata, Hirofumi Funabashi, 1991 .

Surface-mountable capacitive tactile sensors with flipped CMOS-diaphragm on a flexible and stretchable bus line☆

Yutaka Nonomura, Shuji Tanaka, Masanori Muroyama, 2016 .

Polysilicon vibrating gyroscope vacuum-encapsulated in an on-chip micro chamber

Toshiyuki Tsuchiya, Hirofumi Funabashi, Yasuyuki Kageyama, 2001 .

300 μm Deep through silicon via in laser-ablated CMOS multi-project wafer for cost-effective development of integrated MEMS

Yutaka Nonomura, Shuji Tanaka, Masanori Muroyama, 2017, 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).

Vibrating gyroscope consisting of three layers of polysilicon thin films

Toshiyuki Tsuchiya, Hirofumi Funabashi, Yasuyuki Kageyama, 2000 .

Thermal micropressure sensor for pressure monitoring in a minute package

Hirofumi Funabashi, Motohiro Fujiyoshi, Jiro Sakata, 2001 .

A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

Toshiyuki Tsuchiya, Hirofumi Funabashi, 2004 .

Quad-seesaw-electrode type 3-axis tactile sensor with low nonlinearities and low cross-axis sensitivities

Yutaka Nonomura, Shuji Tanaka, Masanori Muroyama, 2017 .