M. Muta

Two-dimensional spatial profiles of plasma parameters in DC reactive magnetron sputtering of indium-tin-oxide

Y. Matsuda, H. Fujiyama, M. Muta, 1999 .

Two-dimensional spatial distributions of sputtered particles produced in a planar magnetron discharge of indium-tin-oxide target

Y. Matsuda, H. Fujiyama, M. Muta, 1999 .