S. Hahn

Design, Modeling, Fabrication, and Verification of New Multifunctional MEMS/NEMS Components

U. Heinkel, E. Markert, S. Voigt, 2019, physica status solidi (a).

Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements − Technology and Functional Test Results

B. Wunderle, K. Hiller, P. Meszmer, 2019, physica status solidi (a).

Multi-Mode Silicon Waveguides at Long Infrared Wavelengths

K. Hiller, S. Kurth, S. Hahn, 2022, 2022 Smart Systems Integration (SSI).

Nanomechanical Characterization of Vertical Nanopillars Using an MEMS-SPM Nano-Bending Testing Platform

Karla Hiller, Erwin Peiner, Zhi Li, 2019, Sensors.

An active reference spring array for in-situ calibration of the normal spring constant of AFM cantilevers

Sai Gao, Susann Hahn, K. Hiller, 2015, Microtechnologies for the New Millennium.

Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range

Sai Gao, Uwe Brand, Karla Hiller, 2015 .