Glenn M. Beheim

发表

Demonstration of a Packaged Capacitive Pressure Sensor System Suitable for Jet Turbofan Engine Health Monitoring

Gary W. Hunter, Roger D. Meredith, Maximilian C. Scardelletti, 2016, 2016 IEEE 66th Electronic Components and Technology Conference (ECTC).

An Overview of Wide Bandgap SiC Sensor and Electronics Development at NASA Glenn Research Center

Gary W. Hunter, Liang-Yu Chen, Glenn M. Beheim, 2007 .

MEMS: Introduction and Fundamentals

Glenn M. Beheim, 2005 .

Invited) High Temperature Wireless Smart Sensor Technology Based on Silicon Carbide Electronics

Gary W. Hunter, George E. Ponchak, Roger D. Meredith, 2014 .

CHARACTERISTICS OF A HERMETIC 6H-SIC PRESSURE SENSOR AT 600°C

Glenn M. Beheim, Robert S. Okojie, George J. Saad, 2001 .

Magnetron plasma etching of SiC for microstructures

Glenn M. Beheim, Carl Salupo, 1996, Photonics West.

Development of High Temperature Smart Sensor Systems

Gary W. Hunter, Roger D. Meredith, Glenn M. Beheim, 2011 .

An Overview of High Temperature Electronics and Sensor Development at NASA Glenn Research Center

Gary W. Hunter, Liang-Yu Chen, Glenn M. Beheim, 2002 .

Wireless seismometer for venus

George E. Ponchak, Walter S. Kiefer, Gary W. Hunter, 2014, 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet).

An Overview of High-Temperature Electronics and Sensor Development at NASA Glenn Research Center

Gary W. Hunter, Liang-Yu Chen, Glenn M. Beheim, 2003 .

Development and application of high-temperature sensors and electronics for propulsion applications

Gustave C. Fralick, John D. Wrbanek, Gary W. Hunter, 2006, SPIE Defense + Commercial Sensing.

Wireless capacitive pressure sensor operating up to 400°c from 0 to 100 psi utilizing power scavenging

Gary W. Hunter, George E. Ponchak, Roger D. Meredith, 2014, 2014 IEEE Topical Conference on Wireless Sensors and Sensor Networks (WiSNet).

Deep RIE Process for Silicon Carbide Power Electronics and MEMS

Glenn M. Beheim, Carl Salupo, G. Beheim, 2000 .

Extreme temperature 6H‐SiC JFET integrated circuit technology

Steven L. Garverick, Mehran Mehregany, Michael J. Krasowski, 2009 .

SiC Field Effect Transistor Technology Demonstrating Prolonged Stable Operation at 500 °C

Roger D. Meredith, Liang-Yu Chen, Glenn M. Beheim, 2007 .

4H-SiC JFET Multilayer Integrated Circuit Technologies Tested Up to 1000 K

Liang-Yu Chen, Glenn M. Beheim, David J. Spry, 2015 .

Evidence of Processing Non-Idealities in 4H-SiC Integrated Circuits Fabricated with Two Levels of Metal Interconnect

Glenn M. Beheim, Philip G. Neudeck, David J. Spry, 2016 .

Fabrication and probabilistic fracture strength prediction of high-aspect-ratio single crystal silicon carbide microspecimens with stress concentration

Noel N. Nemeth, Osama M. Jadaan, William N. Sharpe, 2007 .

600 °C Logic Gates Using Silicon

Glenn M. Beheim, Philip G. Neudeck, C. S. Salupo, 2000 .

Long-Term Characterization of 6H-SiC Transistor Integrated Circuit Technology Operating at 500 C

Michael J. Krasowski, Roger D. Meredith, Liang-Yu Chen, 2008 .

High Temperature Capacitive Pressure Sensor Employing a SiC Based Ring Oscillator

George E. Ponchak, Michael J. Krasowski, Gary W. Hunter, 2012 .

Processing and Prolonged 500 °C Testing of 4H-SiC JFET Integrated Circuits with Two Levels of Metal Interconnect

Michael J. Krasowski, Liang-Yu Chen, Glenn M. Beheim, 2016 .

Electrical Performance of a 32-I/O HTCC Alumina Package for High-Temperature Microelectronics

Gary W. Hunter, Liang-Yu Chen, Glenn M. Beheim, 2017 .

Prolonged 500 °C Demonstration of 4H-SiC JFET ICs With Two-Level Interconnect

Glenn M. Beheim, Philip G. Neudeck, David J. Spry, 2016, IEEE Electron Device Letters.

Fabrication and Testing of 6H-SiC JFETs for Prolonged 500 °C Operation in Air Ambient

Roger D. Meredith, Liang-Yu Chen, Glenn M. Beheim, 2008 .