W. Kafrouni

EPR investigations of mesoporous silica doped with metal transitions ions

A. Gibaud, J. Alauzun, A. Kassiba, 2006 .

Parametric study of STiGer etching process in order to reduce extended formation of scalloping defects on the sidewalls of silicon submicron trenches

M. Boufnichel, P. Lefaucheux, P. Ranson, 2016 .

Optimization of submicron deep trench profiles with the STiGer cryoetching process: reduction of defects

M. Boufnichel, P. Lefaucheux, P. Ranson, 2011 .

Synthesis of PECVD a-SiCXNY:H membranes as molecular sieves for small gas separation

A. Julbe, V. Rouessac, J. Durand, 2009 .