V. Chavva

Fin Doping by Hot Implant for 14nm FinFET Technology and Beyond

Man-Ping Cai, Shashank Sharma, Motoya Okazaki, 2013 .

Process characterization for hydrogen and helium implantation

A. Waite, H. Gossmann, B. Guo, 2014, 2014 20th International Conference on Ion Implantation Technology (IIT).

Gettering of the metal impurities in image sensors: An evaluation of heated carbon implants

V. Chavva, 2014, 2014 20th International Conference on Ion Implantation Technology (IIT).