Dwight Roh

Damage control of ion implantation for advanced doping process by using in-situ temperature control

M. Ameen, Daeho Yoon, L. Rubin, 2020 .

Super Activation of Highly Surface Segregated Dopants in High Ge Content SiGe Obtained by Melt UV Laser Annealing

T. Tabata, K. Huet, F. Mazzamuto, 2018, 2018 22nd International Conference on Ion Implantation Technology (IIT).

Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing

B. Sermage, T. Tabata, F. Mazzamuto, 2021, ECS Journal of Solid State Science and Technology.

Silicon damage control through the use of aromatic hydrocarbon ion implantation

M. Ameen, Daeho Yoon, Kyung-Won Lee, 2020 .