J. Weichart

Plasma polymerization of silicon organic membranes for gas separation

J. Müller, J. Weichart, 1993 .

Evaluation of ICP Sputter Etch with Reducing Atmosphere for the Improvement of Rc in UBM/RDL Applications

J. Weichart, Patrik Carazzetti, A. Erhart, 2020, 2020 IEEE 70th Electronic Components and Technology Conference (ECTC).