Steve Martin

A new approach to SiO2 deposit using a N2-SiH4-N2O glow dielectric barrier-controlled discharge at atmospheric pressure

N. Gherardi, F. Massines, Steve Martin, 2000 .

Atmospheric pressure plasma deposition of thin films by Townsend dielectric barrier discharge

N. Gherardi, F. Massines, Steve Martin, 2005 .

Integration of chemical vapor deposition Al interconnects in a benzocyclobutene low dielectric constant polymer matrix: A feasibility study

S. Sankaran, A. Kaloyeros, R. Geer, 2000 .

Atmospheric pressure PE-CVD of silicon based coatings using a glow dielectric barrier discharge

Françoise Massines, Nicolas Gherardi, Steve Martin, 2003 .

Evaluation of Crack and Corrosion Detection Sensitivity Using Piezoelectric Sensor Arrays (Preprint)

James L. Blackshire, Adam Cooney, Steve Martin, 2006 .

Material and process studies in the integration of plasma-promoted chemical-vapor deposition of aluminum with benzocyclobutene low-dielectric constant polymer

A. Kaloyeros, R. Geer, A. Knorr, 2000 .