N. Bénissad

Structure and properties of silicon oxide films deposited in a dual microwave-rf plasma reactor

A. Goullet, A. Granier, K. Aumaille, 2001 .

Silicon dioxide deposition in a microwave plasma reactor

C. Vallée, A. Goullet, A. Granier, 1999 .

Plasma-polymerized coatings using HMDSO precursor for iron protection

R. Messina, A. Chaussé, P. Leprince, 2000 .