Jun Ji

Role of Additive in Alkaline Slurries for Co CMP

P. He, Guofeng Pan, Yichen Du, 2017 .

Role of 1,2,4-Triazole in Co/Cu Removal Rate Selectivity and Galvanic Corrosion during Barrier CMP

Lina Han, Xinhuan Niu, Yuling Liu, 2017 .

Effect of Guanidinium Ions on Ruthenium CMP in H2O2-Based Slurry

Lina Han, Jianwei Zhou, Yanlei Li, 2017 .