S. Sherman

TFT Performance - Material Quality Correlation for a-Si:H Deposited at high Rates

R. Gottscho, S. Wagner, S. Sherman, 1995 .

Correlation between the valence‐ and conduction‐band‐tail energies in hydrogenated amorphous silicon

R. Gottscho, S. Wagner, S. Sherman, 1996 .

Relationship between a-Si:H band tails and TFT performance

S. Wagner, S. Sherman, 1995, Proceedings of Second International Workshop on Active Matrix Liquid Crystal Displays.

High Deposition Rate a-Si:H for the Flat Panel Display Industry

S. Wagner, H. Meiling, J. Hautala, 1996 .

Simultaneous Relaxation of Network and Defects in Silicon-Implanted a-Si:H *

S. Wagner, P. Stolk, J. Poate, 1995 .

Integration and characterization of gas cluster processing for copper interconnects electromigration improvement

E. Petitprez, T. Chevolleau, G. Imbert, 2007 .

Gas cluster ion beam infusion processing of semiconductors

J. Hautala, S. Sherman, M. Gwinn, 2006 .

Modeling and Scaling of a-Si:H and Poly-Si Thin Film Transistors

Trond Ytterdal, Arokia Nathan, L. Wang, 1997 .

Reduction of GIDL Using Dual Work-Function Metal Gate in DRAM

S. Manhas, S. Maheshwaram, S. Jo, 2016, 2016 IEEE 8th International Memory Workshop (IMW).