Yoshitaka Tsunashima

Technology and applications of silicon-on-nothing

Ichiro Mizushima, Tsutomu Sato, Yoshitaka Tsunashima, 2005 .

ED2000-131 / SDM2000-113 / ICD2000-67 A New Substrate Engineering Technique to Realize Silicon on Nothing (SON) Structure Utilizing Surface Migration

Ichiro Mizushima, Yoshitaka Tsunashima, Tsutomu Sato, 2000 .

Film composition and its profile control of hfsion for poly-Su gate cmosfet with high performance and reliability

Yoshitaka Tsunashima, Motoyuki Sato, Takashi Watanabe, 2005 .

Gas cleaning technique for batch furnace at Agile-fab concept manufacturing

Yoshitaka Tsunashima, Takashi Nakao, Shuji Katsui, 2001, 2001 IEEE International Symposium on Semiconductor Manufacturing. ISSM 2001. Conference Proceedings (Cat. No.01CH37203).

Source/drain engineering for sub-100 nm CMOS using selective epitaxial growth technique

Ichiro Mizushima, Yoshitaka Tsunashima, Kazuya Ohuchi, 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).

Micro-structure Transformation of Silicon: A Newly Developed Transformation Technology for Patterning Silicon Surfaces using the Surface Migration of Silicon Atoms by Hydrogen Annealing

Ichiro Mizushima, Yoshitaka Tsunashima, Kunihiro Mitsutake, 2000 .

FinFET: the prospective multi-gate device for future SoC applications

Yoshitaka Tsunashima, Takashi Izumida, Atsushi Yagishita, 2006 .

Fabrication of Silicon-on-Nothing Structure by Substrate Engineering Using the Empty-Space-in-Silicon Formation Technique

Ichiro Mizushima, Yoshitaka Tsunashima, Satoshi Shimonishi, 2004 .

Effects of Nitrogen Concentration and Post-treatment on Reliability of HfSiON Gate Dielectrics in Inversion States

Yoshitaka Tsunashima, Kazuhiro Eguchi, Katsuyuki Sekine, 2005 .

High performance damascene metal gate MOSFETs for 0.1 /spl mu/m regime

Yoshitaka Tsunashima, Katsuhiko Hieda, Y. Akasaka, 2000 .

Film Properties of Low‐k Silicon Nitride Films Formed by Hexachlorodisilane and Ammonia

Yoshitaka Tsunashima, Y. Tsunashima, Masayuki Tanaka, 2000 .

Determination of Band Alignment of Hafnium Silicon Oxynitride/Silicon (HfSiON/Si) Structures using Electron Spectroscopy

Yoshitaka Tsunashima, Masamichi Suzuki, Masato Koyama, 2005 .

Improvement of threshold voltage deviation in damascene metal gate transistors

Yoshitaka Tsunashima, Tsuyoshi Shibata, Atsushi Yagishita, 2001 .