S. Halder
发表
Sandip Halder,
Bart Swinnen,
Kurt Wostyn,
2009,
2009 59th Electronic Components and Technology Conference.
S. Halder,
K. Kenis,
T. Bearda,
2009,
IEEE Transactions on Semiconductor Manufacturing.
M. Caymax,
Y. Mols,
E. Vancoille,
2014,
25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014).
Imen Chakroun,
Sandip Halder,
Thomas J. Ashby,
2020,
ICPRAM.
M. Bayoumi,
P. Leray,
S. Halder,
2022,
Metrology, Inspection, and Process Control XXXVI.
G. Mannaert,
D. Tsvetanova,
T. Conard,
2009
.
E. Rosseel,
A. Mani,
H. Osman,
2013,
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.
B. Dutta,
A. Mani,
H. Osman,
2012,
2012 SEMI Advanced Semiconductor Manufacturing Conference.
D. de Simone,
P. Leray,
G. Lorusso,
2022,
Photomask Technology.
K. Wostyn,
T. Bearda,
P. Mertens,
2009
.
P. Leray,
S. Halder,
Kaushik Sah,
2020,
IEEE Transactions on Semiconductor Manufacturing.
P. De Moor,
A. Witvrouw,
L. Haspeslagh,
2009,
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.
Kotaro Maruyama,
Yuichiro Yamazaki,
Sayantan Das,
2020,
Advanced Lithography.
S. Gendt,
S. Halder,
Bappaditya Dey,
2023,
ArXiv.
S. Halder,
Bappaditya Dey,
Enrique Dehaerne,
2022,
2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS).
Sandip Halder,
Thomas I. Wallow,
Harm Dillen,
2017,
Advanced Lithography.
Peter De Bisschop,
Sandip Halder,
Vidyasagar Anantha,
2018,
Photomask Technology.
S. Gendt,
Changhai Wang,
S. Halder,
2023,
IEEE Transactions on Semiconductor Manufacturing.
Sandip Halder,
Kaushik Sah,
Philippe Leray,
2015,
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Magdy A. Bayoumi,
Joren Severi,
Sandip Halder,
2021,
Advanced Lithography.
Sandip Halder,
Philippe Leray,
Dorin Cerbu,
2018,
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
S. Gendt,
S. Halder,
Bappaditya Dey,
2023,
arXiv.org.
Paulina A. Rincon-Delgadillo,
Z. Tokei,
P. Leray,
2023,
Advanced Lithography.
EPE analysis of sub-N10 BEoL flow with and without fully self-aligned via using Coventor SEMulator3D
William W. Clark,
Sandip Halder,
Matt Gallagher,
2017,
Advanced Lithography.
Eric Beyne,
Sandip Halder,
Mireille Maenhoudt,
2012,
2011 IEEE International 3D Systems Integration Conference (3DIC), 2011 IEEE International.
D. Tsvetanova,
R. Vos,
P. Mertens,
2010
.
S. Gendt,
S. Halder,
Bappaditya Dey,
2023,
Advanced Lithography.